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00926cam a22002651u 45x0
000000332734
20120927145832
921215s1993 uk 001 eng
▼a 92045674
▼a 0412395509 (alk. paper)
▼a DLC
▼c DLC
▼a eng
▼h jap
▼a KMAL
▼l AZ0000164715
▼a 621.38173
▼2 20
▼a 621.38173
▼b So1i
▼a Introduction to VLSI process engineering/
▼d edited by the Society of Chemical Engineers of Japan;
▼e editor in chief, Yuji Naka.
▼a English language ed.
▼a London;.
▼a New York:
▼b Chapman & Hall,
▼c 1993.
▼a xiii, 210 p.; 24 cm.
▼a Includes index.
▼a Integrated circuits
▼x Very large scale integration
▼x Design and construction.
▼a Manufacturing processes.
▼a INTRODUCTION
▼a TO
▼a VLSI
▼a PROCESS
▼a ENGINEERING
▼a Naka, Yuji,
▼d 1945-,
▼a Kagaku K?gaku Ky?kai (Japan).
▼a 단행본
▼a 621.38173
▼b So1i
| 자료유형 : | 단행본 |
|---|---|
| ISBN : | 0412395509 (alk. paper) |
| 분류기호 : | 621.38173 |
| 서명/저자사항 : | Introduction to VLSI process engineering/ edited by the Society of Chemical Engineers of Japan; editor in chief, Yuji Naka. |
| 판사항 : | English language ed. |
| 발행사항 : | London;. New York: Chapman & Hall, 1993. |
| 형태사항 : | xiii, 210 p.; 24 cm. |
| 일반주기 : | Includes index. |
| 일반주제명 : | Integrated circuits -- Very large scale integration -- Design and construction. -- |
| 일반주제명 : | Manufacturing processes. -- |
| 개인저자 : | Naka, Yuji, 1945-, |
| 단체저자명 : | Kagaku K?gaku Ky?kai (Japan). |
| 분류기호 : | 621.38173 |
| 언어 | 영어 |
항공우주(航空宇宙) = Monthly aerospace industry
629.13005 항15하
월간항공(月刊航空) = Aerospace & Defense
629.13005 항15
드론매거진 = DRONE MAGAZINE
623.746905 드29ㄷ
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