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00894nam a2200265 u 4500
000000385016
20120928101151
050117s2003 us a b 001 eng
▼a 2002040665
▼a 0306474972:
▼c EUR71.00
▼a DLC
▼c DLC
▼d DLC
▼d HYUC
▼d 211062
▼d 211047
▼a pcc
▼l AZ0000224748
▼a 621.044
▼2 21
▼a 621.044
▼b C42L
▼a Lecture notes on principles of plasma processing/
▼d Francis F. Chen and Jane P. Chang.
▼a New York:
▼b Kluwer Academic/Plenum Publishers,
▼c c2003.
▼a ix, 208 p.:
▼b ill.;
▼c 28 cm+
▼e 1 electronic optical disc.
▼a Plasma engineering.
▼a Plasma chemistry.
▼a Plasma dynamics.
▼a LECTURE
▼a NOTES
▼a ON
▼a PRINCIPLES
▼a OF
▼a PLASMA
▼a PROCESSING
▼a Chen, Francis F.,
▼d 1929-,
▼a Chang, Jane P.,
▼d 1970-,
▼b 211062,강지윤
▼b 211047,김영미
▼a 단행본
▼a 621.044
▼b C42L
| 자료유형 : | 단행본 |
|---|---|
| ISBN : | 0306474972: |
| 분류기호 : | 621.044 |
| 서명/저자사항 : | Lecture notes on principles of plasma processing/ Francis F. Chen and Jane P. Chang. |
| 발행사항 : | New York: Kluwer Academic/Plenum Publishers, c2003. |
| 형태사항 : | ix, 208 p.: ill.; 28 cm+ 1 electronic optical disc. |
| 일반주제명 : | Plasma engineering. -- |
| 일반주제명 : | Plasma chemistry. -- |
| 일반주제명 : | Plasma dynamics. -- |
| 개인저자 : | Chen, Francis F., 1929-, |
| 개인저자 : | Chang, Jane P., 1970-, |
| 분류기호 : | 621.044 |
| 언어 | 영어 |
항공우주(航空宇宙) = Monthly aerospace industry
629.13005 항15하
월간항공(月刊航空) = Aerospace & Defense
629.13005 항15
드론매거진 = DRONE MAGAZINE
623.746905 드29ㄷ
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